PPT Slide

Need For Micromachined Shear Stress Sensors

• To accurately capture the complete spectrum of turbulent fluctuations.

- Spatial resolution ~ O(100 mm)

- Temporal resolution ~ O(10 kHz)

Interdisciplinary

Microsystems

Group

- Accurate

- Linear

- Fragile

- Robust

- Based on empirical relations

between H-T and shear stress.

Cain, A., et al., "Development of a Wafer-Bonded, Silicon-Nitride

Membrane Thermal Shear-Stress Sensor with Platinum Sensing

Element," Technical Digest, Solid-State Sensor and Actuator

Workshop, HH, June’00

Padmanabhan, A., et al., “Wafer-bonded floating-

element shear stress microsensor with optical

position sensing by photodiodes,” JMEMS, 1996.

Ref:

Ref:

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