PPT Slide
Effect of Vacuum Cavity on Sensor Performance
Heat conduction is now restricted to the 1500 Å silicon nitride membrane.
Liu, C., Tai, Y., Huang, J., and Ho, C., “Surface Micromachined Thermal Shear Stress Sensor,” Proceedings, the ASME Symposium on Application of Microfabrication to Fluid Mechanics, Winter Annual Meeting, Chicago, 1994.