PPT Slide

UF Thermal Sensor

Interdisciplinary

Microsystems

Group

Vacuum cavity

Improvements
• higher TCR compared to Polysilicon
• higher thermal operating range
  (this provides improved temperature stability)
  
• lower impedance
• reduced 1/f noise
• no piezoresistive-induced pressure sensitivity

200mm x 4mm thin film Platinum

Previous slide

Next slide

Back to first slide

View graphic version