PPT Slide
Conclusions
- Thorough characterization of the sensor in a CC mode of excitation using four-point probe configuration has been performed, including an in-situ dynamic calibration.
- Noise floor measurements in the operational range of the sensor have been obtained (100 nV/?Hz).
- The dynamic range of operation of the sensor has been experimentally verified (9 mPa-1.7 Pa) and the FRF obtained from 200 Hz to 7 kHz.
- The sensitivity to pressure and its effect on the dynamic response has been shown to be negligible (< 1 mV/Pa).
- The uncompensated sensor displays characteristics of a highly damped second order system with a corner frequency of ? 600 Hz.